AURIGA Compact FIB-SEM Microscope from ZEISS

In this video, Ingo Schulmeyer discusses AURIGA Compact, a FIB-SEM with applications in nanotomography, 3D analysis, sample preparation, and nanopatterning. The system achieves a resolution of 2.5 nm, even at a low acceleration voltage of 1 kV. The combined in-lens SE and BSE detector and the local charge compensation deliver high topographical contrast and eliminate charging effects of your insulating materials.